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MCS Inspection
| Microscopic optical inspection: on wafers, reticles, substrates
optical-visual control after AQL (Acceptance Quality Level) criteria |
Mikroskopisch optische Inspektion von Wafern, Lithografie-Masken und Substraten
optisch-visuelle Kontrolle nach AQL (acceptance quality level) Kriterien |
| | | |  | software-supported, microscope inspection of wafers and frames Definierte,... | | | | | | | | | | | |  | MCS INK software works with software controllable microscopes for virtual... | | | | | | | | | | | |  | aktive Fehlersuche, verbesserte Bildaufnahme und flexible Bildverarbeitung | | | | | | | | | | | |  | for NIR applications (about 760-2500nm) für NIR Anwendungen (ca. 760-2500nm) | | | | | | | | | | | |  | (PlugIn for MCS OI) Defectreview for wafer/substrates based on imported... | | | | | |
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