Defect Review System
Interactive review is based on imported defect codes (KLA data i.e. KLARF files (KLARF is registered trademark of KLA Tencor)). Thereby the coordinate system refers to the same reference point which was used for automatic defect scan before. To carry out the alignment you have two options: either automatically or interactively by means of reference structures or with bare wafers by means of wafer edge detection. To improve precision fine alignment can be applied additionally. Even the smallest defects and lowest in contrast ones are reliably positioned in the center of the camera picture by the motorized stage.
The imported defects are displayed graphically as zoomable wafermap and listed in a chart with all features available.
In order to choose all relevant defects the MCS-RV software offers comfortable sorting functions with logical link options of all features.
The selected defects are marked via mouse click in the chart or map and positioned in the center of the camera picture i.e. the eye-piece picture and can be analysed with all available magnifications and microscopic contrast methods.
For this purpose, the MCS Application-Software offers the operater many useful tools. Several measuring tools enable precise statements on morphology and geometry of the defects. Lenth, width, diameter, area, density i.e..
Also height determination can easily be carried out by analysing focus drive z- encoder or laserautofocus.
In order to prepare for an offline review operating mode a fully automatic picture recording of the defects is possible. Via the flexibly useable "MCS actionprocessing" it is even possible to record optionally with several magnifications and/or contrast methods per defect. Later the defect analysis can be carried out on any offline PC on the basis of the generated picture data.
The defect classification is enlisted in the editable and expandable defect code chart.
The whole data set then can be rewritten as updated KLARF file and assigned to a higher level yield Management software.