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Interference WLI
| Vertical scanning whitelight interference microscopy ( VSI or WLI ) and Phaseshift interference microscopy ( PSI )
for nanometer and sub nanometer resolution; advanced surface metrology; 3D topology data |
Vertikal Scanning Weißlicht Interferenzmikroskopie (WLI) und Phasenshift Interferenz Mikroskopie ( PSI ) für Nanometer und Sub-Nanometer Auflösung. Fortgeschrittene Oberflächen Metrology; 3D Topologie-Daten |
| | | | |  | software for fast, reliable tool for contact-free determination of 3-d topographies... | | | | | |
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